Laser generation of nano-bumps below 2 nm height on silicon for debris-free marking/patterning
نویسندگان
چکیده
منابع مشابه
Nano-optoelectronic Integration on Silicon Nano-optoelectronic Integration on Silicon Nano-optoelectronic Integration on Silicon
All rights reserved INFORMATION TO ALL USERS The quality of this reproduction is dependent upon the quality of the copy submitted. In the unlikely event that the author did not send a complete manuscript and there are missing pages, these will be noted. Also, if material had to be removed, a note will indicate the deletion. Modern silicon technology offers unprecedented spatial and temporal con...
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ژورنال
عنوان ژورنال: Journal of Physics D: Applied Physics
سال: 2010
ISSN: 0022-3727,1361-6463
DOI: 10.1088/0022-3727/43/11/115302